发明名称 |
SHEET BEAM TEST APPARATUS |
摘要 |
An electron beam apparatus such as a sheet beam based testing apparatus has an electron-optical system for irradiating an object under testing with a primary electron beam from an electron beam source, and projecting an image of a secondary electron beam emitted by the irradiation of the primary electron beam, and a detector for detecting the secondary electron beam image projected by the electron-optical system; specifically, the electron beam apparatus comprises beam generating means 2004 for irradiating an electron beam having a particular width, a primary electron-optical system 2001 for leading the beam to reach the surface of a substrate 2006 under testing, a secondary electron-optical system 2002 for trapping secondary electrons generated from the substrate 2006 and introducing them into an image processing system 2015, a stage 2003 for transportably holding the substrate 2006 with a continuous degree of freedom equal to at least one, a testing chamber for the substrate 2006, a substrate transport mechanism for transporting the substrate 2006 into and out of the testing chamber, an image processing analyzer 2015 for detecting defects on the substrate 2006, a vibration isolating mechanism for the testing chamber, a vacuum system for holding the testing chamber at a vacuum, and a control system 2017 for displaying or storing positions of defects on the substrate 2006. |
申请公布号 |
EP1304717(A4) |
申请公布日期 |
2009.12.09 |
申请号 |
EP20010945626 |
申请日期 |
2001.06.27 |
申请人 |
EBARA CORPORATION |
发明人 |
NAKASUJI, MAMORU;NOJI, NOBUHARU;SATAKE, TOHRU;KIMBA, TOSHIFUMI;SOBUKAWA, HIROSI;KARIMATA, TSUTOMU;OOWADA, SHIN;YOSHIKAWA, SHOJI;SAITO, MUTSUMI |
分类号 |
G01N23/225;G03F1/76;G03F1/78;H01J37/06;H01J37/073;H01J37/18;H01J37/20;H01J37/22;H01J37/244;H01J37/28;(IPC1-7):H01J37/29;G01B15/00;H01L21/30 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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