| 摘要 |
Embodiments of the invention provide a detection apparatus for detecting charged particles having a charged particle detector for receiving and detecting either incoming charged particles or secondary charged particles generated from the incoming charged particles, a photon generator for generating photons in response to receiving at least some of the same incoming charged particles or secondary charged particles generated from the incoming charged particles as are received and detected by the charged particle detector, and a photon detector for detecting photons generated by the photon generator. |
