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发明名称
摘要
申请公布号	JP4372847(B2)	申请公布日期	2009.11.25
申请号	JP19990534675	申请日期	1998.10.05
申请人		发明人
分类号	H01L21/316;H01L21/322;H01L21/301;H01L21/76;H01L21/762;H01L27/12	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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