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摘要
申请公布号
JP4372914(B2)
申请公布日期
2009.11.25
申请号
JP19990284118
申请日期
1999.10.05
申请人
发明人
分类号
C03B32/00;H01L21/203;C03C23/00;C03C27/06;C23C14/34;C23C16/46;G02F1/13;G02F1/1333;G02F1/1339
主分类号
C03B32/00
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代理人
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地址
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