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经营范围
发明名称
An integrated lid formed on mems device
摘要
申请公布号
EP1640334(B1)
申请公布日期
2009.11.25
申请号
EP20050255976
申请日期
2005.09.26
申请人
STMICROELECTRONICS, INC.
发明人
CHIU, ANTHONY M.;SIEGEL, HARRY MICHAEL
分类号
B81B7/00
主分类号
B81B7/00
代理机构
代理人
主权项
地址
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