| 摘要 |
PURPOSE: A frame structure for facilitating a board processing task by efficiently utilizing the installation space of a substrate processing apparatus is provided to easily confirm the inside of the frame structure by blocking one side of the frame structure. CONSTITUTION: One side of frames(310, 320) is opened. Space for a substrate processing is formed inside the frame. An opening and closing unit(330) include a cover unit and a hinge unit. The cover unit covers opened one side of the frame. The hinge unit combines the cover unit and the frame by a hinge. A receiving unit is installed in the frame. When the cover unit is opened, the cover unit is inserted according to the sliding-type into the receiving unit. |
