<p>A solvent evaporation controller is provided to obtain the optimum evaporation condition by measuring the partial pressure related to the evaporation of the solvent included in the CIGS nano particle ink in real time. A chamber(110) forms an outer appearance of a solvent evaporation controller(100). A substrate(190) coated with the CIGS nano particle is located inside the chamber. A partial pressure measuring unit(170) is formed in an arbitrary position inside the chamber. A central temperature controller(130) supplies the heat energy to the substrate to control the temperature of the substrate coated with the CIGS nano particle ink. A solvent outlet controller(150) controls an area of the solvent outlet to evaporate the solvent of the CIGS nano particle. The solvent evaporation controller includes the controller to control the operation of the solvent outlet controller and the central temperature controller according to the measured partial pressure by the partial pressure measuring unit.</p>
申请公布号
KR20090063654(A)
申请公布日期
2009.06.18
申请号
KR20070131102
申请日期
2007.12.14
申请人
LG ELECTRONICS INC.
发明人
KIM, HYUNG SEOK;LEE, YOUNG HEE;KIM, HO GYOUNG;CHOI, YONG WOO;CHOE, YOUNG HO;KIM, HYE WON;KIM, JIN SUNG;AHN, JIN HYUNG