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发明名称
Konstanter Leistungsumsatz in kapazitiven Druckwandlern
摘要
申请公布号
DE112007001835(T5)
申请公布日期
2009.06.18
申请号
DE200711001835T
申请日期
2007.08.09
申请人
MKS INSTRUMENTS INC.
发明人
MAIORANA, PHILIP J.;MATHEW, SANTHI E.
分类号
G01L9/12
主分类号
G01L9/12
代理机构
代理人
主权项
地址
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