CERAMIC SUBSTRATE, METHOD FOR PRODUCING CERAMIC SUBSTRATE AND METHOD FOR PRODUCING POWER MODULE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic substrate which has a sufficient junction strength in bonding the ceramic substrate containing silicon nitride and a metal substrate, and to provide a method for producing the ceramic substrate and power module substrate. SOLUTION: The ceramic substrate is formed by dividing a ceramic base material along a scribe line formed on one face of the ceramic material containing silicon nitride, and when the surface is measured using by an electron probe micro analyzer, the concentration of a silicon oxide and a composite oxide of silicon on the face is not more than 2.7 Atom%. COPYRIGHT: (C)2009,JPO&INPIT