发明名称 LIQUID DROPPING APPARATUS AND SUBSTRATE TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a liquid dropping apparatus which can supply a liquid crystal from a transporting vessel to a syringe without wasting the liquid crystal. SOLUTION: The liquid-crystal dropping apparatus 21 has a blocking member 29 for blocking an opening part 28 of the transporting vessel 27, a supporting member 26, fixed to the syringe 24, for supporting the blocking member 29 in an attachable and detachable way such that the transporting vessel 27 is in the state that the opening part 28 directs downward, and a tube passage for supplying the liquid crystal from the transporting vessel 27 to the syringe 24. Then, the blocking member 29 consists of a concave part 82 for blocking the opening part 28 of the transporting vessel 27, a female screw part 85 for fixing the transporting vessel 27 to the concave part 82, a penetration hole 87 for communicating with the inside of the transporting vessel 27 and the tube passage, and a supplying valve for opening and closing the penetration hole 87. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009131796(A) 申请公布日期 2009.06.18
申请号 JP20070310613 申请日期 2007.11.30
申请人 ULVAC JAPAN LTD 发明人 NISHIO FUMINOBU;SAWAMORI AKIRA;SHIMIZU MUNEHARU;HASEGAWA TAKEYUKI
分类号 B05C5/00;B05C11/10 主分类号 B05C5/00
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