发明名称 |
MODULAR FLOW CELL AND ADJUSTMENT SYSTEM |
摘要 |
A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.
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申请公布号 |
US2009155936(A1) |
申请公布日期 |
2009.06.18 |
申请号 |
US20080333226 |
申请日期 |
2008.12.11 |
申请人 |
WEINER KURT;FRANCIS AARON;WILLIAMS KEN |
发明人 |
WEINER KURT;FRANCIS AARON;WILLIAMS KEN |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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