发明名称 BIOSENSOR USING SILICON NANOWIRE AND METHOD OF MANUFACTURING THE SAME
摘要 Provided are a biosensor using a silicon nanowire and a method of manufacturing the same. The silicon nanowire can be formed to have a shape, in which identical patterns are continuously repeated, to enlarge an area in which probe molecules are fixed to the silicon nanowire, thereby increasing detection sensitivity. In addition, the detection sensitivity can be easily adjusted by adjusting a gap between the identical patterns of the silicon nanowire depending on characteristics of target molecules, without adjusting a line width of the silicon nanowire in the conventional art. Further, the gap between the identical patterns of the silicon nanowire can be adjusted depending on characteristics of the target molecule to differentiate detection sensitivities, thereby simultaneously detecting various detection sensitivities.
申请公布号 US2009152598(A1) 申请公布日期 2009.06.18
申请号 US20080240114 申请日期 2008.09.29
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 BAEK IN BOK;YANG JONG HEON;AHN CHANG GEUN;YU HAN YOUNG;AH CHIL SEONG;PARK CHAN WOO;KIM AN SOON;KIM TAE YOUB;JANG MOON GYU;JUN MYUNG SIM
分类号 H01L29/00;H01L21/00 主分类号 H01L29/00
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