Method for manufacturing component or multiple components with micromechanical functional units, involves joining base element and attachment element for forming part of housing of component

摘要

The method involves joining base element (1) and an attachment element for forming a part of housing of a component. The base element and the attachment element have a joining structure (4a,4b,5a,5b). The joining structure is provided for mutual contacting. The joining structure is planarized mechanically before joining.