| 摘要 |
PROBLEM TO BE SOLVED: To appropriately inspect electrical characteristics by stabilizing contact between an inspected body and a probe. SOLUTION: A reinforcing member 3 is provided on the upper surface side of a probe card 2 equipped with a support plate 11 supporting the probe 10 and a printed wiring board 13. A plurality of elongate guide holes 50 are formed in the peripheral part of the reinforcing member 3. A bolt 52 fixed on a card holder 4 and a collar 53 provided on the periphery of the bolt 52 are provided in each of the guide holes 50. The longitudinal length of each guide hole 50 is longer than the diameter of the collar 53 while each guide hole 50 is formed so that its longitudinal center line passes through the center of the reinforcing member 3. The reinforcing member 3 itself is allowed to expand horizontally by the guide holes 50. COPYRIGHT: (C)2009,JPO&INPIT |
