| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic lens in which heat generation of a yoke can be suppressed at a low cost regarding the electronic lens. SOLUTION: In the magnetic field type electronic lens using a coil used for a charged particle beam device, this is constituted of the coil 1 to make an electric current flow in order to focus the charged particle beam, the yoke 6 formed to surround the coil 1, a cooling plate 5 adhered to the coil 1 in order to cool the coil 1, and a plate 7 adhered to the cooling plate 5 and formed in a gap between the yoke 6 and the coil 1 so as to cover the coil 1. COPYRIGHT: (C)2009,JPO&INPIT
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