| 摘要 |
It is an object to enable easily adjusting a focus position for coping with thermal lens effects. There is provided a laser-light scanning portion including a Z-axis scanner capable of adjusting the focus position of laser light in the direction of the optical axis, an X-axis scanner and a Y-axis scanner. Further, there are provided a laser driving control portion for controlling a laser oscillation portion and the laser-light scanning portion, a processing-condition setting portion for setting a laser-light outputting condition and a processing pattern as processing conditions for processing in a desired processing pattern, and an amount-of-correction identification section for identifying, as an amount of focus-position correction, the deviation of the focus position in the direction of the optical axis which is caused by thermal lens effects induced based on the laser-light outputting condition set by the processing-condition setting portion. During irradiation of the laser light, the laser driving control portion scans the laser light, in such a way as to add the amount of focus-position correction identified by the amount-of-correction identification section to the processing condition set by the processing-condition setting portion.
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