FILTERING APPARATUS OF VACUUM PUMP

摘要

A filtering apparatus for a vacuum pump is provided to discharge the gas inputted to the filter apparatus through a vacuum pump by forming an auxiliary pipe with a smaller diameter than a guide pipe. A housing(110) prevents the leakage of the gas discharged from a vacuum chamber(10) by surrounding an outer part of an filter apparatus. The filtering fluid is filled in the housing to filter the impurity. An inlet(112) is formed in an outer wall of the housing. An outlet(114) is formed in the outer wall of the housing. A guide pipe(120) is located inside the housing. One side of the guide pipe is connected to a vacuum chamber connection pipe(42) and the inlet. The other side of the guide pipe is soaked in the filtering fluid. An auxiliary pipe(130) is connected to the inside of the filtering fluid through a side of the guide pipe.