A stage device is provided to reduce the vibration of a base stage due to disturbance by reducing the length of a connecting member in a z axial direction. A substrate is installed in a base stage(10). A gantry part(30) moves on the upper part of the base stage. A guide rail(40) and a permanent magnet(42) guide the movement of the gantry part. A guide slider is guided to the guide rail. An electromagnet faces the permanent magnet. The gantry part moves along the guide rail. The gantry support is protruded to the lateral part of the base stage. The guide rail guiding the movement of the gantry part is installed in the gantry support. A cable carrier(60) is installed in the lower side of the gantry support.
