| 摘要 |
A method and a device for compensating the intensity of a magnetic filed of an ECR(Electron Cyclotron Resonance) are provided to obtain the optimized beam intensity by changing the intensity of the magnetic field in a position with the minimum mirror magnetic field. A device for compensating the intensity of a magnetic field of an ECR ion source includes a permanent magnet(9,10), a hexapole magnet(2), and a pair of movable iron yokes. The permanent magnet is equipped in both outer sides of a plasma chamber with a microwave injecting unit and an ion extracting unit and forms a mirror magnetic field. The hexapole permanent magnet is equipped in the outside of the plasma chamber between the permanent magnets and confines the plasma. The pair of movable iron yokes are symmetrically equipped in the center between permanent magnets. An iron yoke cover(8) is equipped in the outside of the permanent magnet and the movable iron yoke. |
