| 摘要 |
A vacuum sealing radio frequency and low frequency conducting actuator is provided to form an electrical conducting path of low impedance between ground points of places according to one end of an actuator shaft and the actuator shaft. A linear actuator includes an actuator body(101), a vacuum bellow(107), a straight moving shaft, and an electrical contact pad. The actuator body has a first part and a second part. Each of the first part and the second part is arranged according to a longitudinal axis of the actuator body. A vacuum bellow is concentrically positioned in the first part of the actuator body. The vacuum bellow is used for sealing the vacuum environment delivered from the second part of the actuator body to the inside of the vacuum bellow. The straight moving shaft is concentrically positioned within the actuator body. The straight moving shaft is moved linearly according to the longitudinal axis of the actuator body. An electrical conducting part of the straight moving shaft receives and transmits a signal. The electrical conducting part is concentrically positioned within the vacuum bellow. The electrical conducting part is electrically insulated from the vacuum bellow. A lift force generating unit of the straight moving shaft is concentrically positioned within the second part of the actuator body. The electrical contact pad is electrically connected with the electrical conducting part of the straight moving shaft. |
