METHOD OF FABRICATING TRANSPARENT CONDUCTING FILM OF ALUMINUM DOPED ZINC OXIDE BY USING AEROSOL

摘要

PROBLEM TO BE SOLVED: To provide a method of fabricating high conductive and high transparent conducting films easily and efficiently at low cost without impairing the conductivity of aluminum doped zinc oxide particulates as a raw material. SOLUTION: The method includes a step (I) of forming aerosol by mixing a carrier gas to aluminum doped zinc oxide particulates, and a step (II) of spraying the aerosol from a nozzle for collision to a substrate and form a transparent conducting film of the particulates. COPYRIGHT: (C)2009,JPO&INPIT