Method and system for optically inspecting parts

摘要

A method and system for optically inspecting parts are provided. The method includes the step of supporting a part along a measurement axis. The method includes scanning the part with an array of spaced planes of radiation so that the part occludes each of the planes of radiation at spaced locations along the axis to create a corresponding array of unobstructed planar portions of the planes of radiation. Each of the unobstructed planar portions contains an amount of radiation which is representative of a respective geometric dimension of the part. The method still further includes measuring the amount of radiation present in each of the unobstructed planar portions to obtain measurement signals. The method includes processing the measurement signals to obtain raw data. The method further includes providing calibration data and processing the calibration data and the raw data to obtain measurements of the part.