发明名称 TRANSISTOR DEVICE AND METHOD
摘要 A field-effect transistor device, including: a semiconductor heterostructure comprising, in a vertically stacked configuration, a semiconductor gate layer between semiconductor source and drain layers, the layers being separated by heterosteps; the gate layer having a thickness of less than about 100 Angstroms; and source, gate, and drain electrodes respectively coupled with said source, gate, and drain layers. Separation of the gate by heterosteps, rather than an oxide layer, has very substantial advantages.
申请公布号 WO2009051663(A2) 申请公布日期 2009.04.23
申请号 WO2008US11652 申请日期 2008.10.10
申请人 THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS;FENG, MILTON;HOLONYAK, NICK, JR. 发明人 FENG, MILTON;HOLONYAK, NICK, JR.
分类号 H01L21/331;H01L29/73 主分类号 H01L21/331
代理机构 代理人
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