发明名称 Befestigungsträger und Herstellungsverfahren
摘要 Submounts for mounting optical devices which have an excellent heat radiating property and can be formed in a wafer state in batch are provided. A metallized electrode including optical device mounting parts and wiring parts is formed on a surface of a first substrate containing an insulating material as a main component, a through hole is formed in a glass substrate serving as a second substrate, the optical device mounting parts of the first substrate are aligned to be located inside the through hole of the second substrate, and the first substrate and the second substrate are joined together by use of a method such as anodic bonding.
申请公布号 DE112007000843(T5) 申请公布日期 2009.04.23
申请号 DE20071100843T 申请日期 2007.04.04
申请人 HITACHI LTD. 发明人 HATA, SYOHEI;SAKAMOTO, EIJI;MATSUSHIMA, NAOKI;TAKEMORI, HIDEAKI;SAKI, MASATOSHI
分类号 H01L33/60;H01L33/62;H01L33/64 主分类号 H01L33/60
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