| 摘要 |
A substrate chuck is provided to facilitate an installation or replacement process by attaching an attaching layer to a jig and installing the jig with the attaching layer in a base. A base(10) has a concave part(12). A jig(20) is detachably installed inside the concave part. An attaching layer(30) is mounted on the surface of the jig and attaches the substrate. A separation unit(40) is installed in a position different from the jig inside the concave part and separates the substrate attached on the attaching layer by the pushing. The separation unit is a lift driven by intersecting a diaphragm or the base. The separation unit is arranged in the center of the concave part.
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