| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve piezoelectric property while preventing peeling of an electric film. <P>SOLUTION: In a method of manufacturing a piezoelectric actuator including an upper electrode film, a lower electrode film and a piezoelectric film arranged between them, the piezoelectric film having a perovskite crystal structure represented by a general formula: ABO<SB>3</SB>, where A includes at least one of Pb and Ba, and B includes at least one of Zr and Ti, is formed on the lower electrode film, and then the piezoelectric film is annealed in an oxygen atmosphere at a temperature not higher than a temperature having been applied to the piezoelectric film during the step of forming. <P>COPYRIGHT: (C)2009,JPO&INPIT |
