| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a defective factor estimation method allowing estimation without missing a treatment chamber that is a defective product occurrence factor even if a production device uses a plurality of treatment chambers, and not allowing erroneous estimation that a group that is not a defective factor is the defective factor even if the production device comprises a plurality of groups. <P>SOLUTION: A division table is created in each the group (process 103), examination of whether each production line becomes the defective product occurrence factor or not is performed by use of the division table (process 104), and a defective factor group candidate is selected from the groups included in the same production line (process 105). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
