| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a plastic mold having a deposition film, having high barrier performance to oxygen and moisture, superior in adhesion, and effectively preventing film separation by moisture, for forming a film, without causing not only the oxidation deterioration but also thermal deformation and the thermal deterioration, even when using a polylactic acid, needless to say when using PET and polyolefine as a plastic base material. <P>SOLUTION: This plastic mold is composed of a plastic substrate 1 and the deposition film 3 formed on a substrate surface by a plasma CVD method. The deposition film 3 includes an organic metallic deposition layer 3a and a hydrocarbon-based deposition layer 3b on which the element ratio C/M (M is a metallic element) is 2.5 to 13 and the element ratio O/M falls within a range of 0.5 or less. The hydrocarbon-based deposition layer 3b falls within a range of 40 to 180 nm in the thickness, and the peak derived from CH, CH<SB>2</SB>and CH<SB>3</SB>is indicated in an area of a frequency of 3200-2600 cm<SP>-1</SP>by FT-IR measurement, and the CH<SB>2</SB>ratio is 35% or less, and the CH<SB>3</SB>ratio is 40% or more. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
