| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer inspecting probe member, and a probe card equipped with the member, whose manufacturing cost and maintenance cost can be reduced, even if a wafer being an inspection object has a wide area and many electrodes to be inspected. SOLUTION: The probe member includes a pillar-shaped core material having a rectangular cross section, and a flexible wiring sheet arranged in such a way as to cover one surface of this core material and its another surface opposite to the one surface. The wiring sheet is equipped with a plurality of connecting electrodes formed on the sheet surface at its part being on the one surface of the core material, according to a pattern corresponding to a part of the electrodes to be inspected on the wafer being the inspection object, and terminal electrodes formed on the sheet surface at its part being on the other surface of the core material, and connected electrically to the connecting electrodes respectively. COPYRIGHT: (C)2009,JPO&INPIT
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