| 摘要 |
PROBLEM TO BE SOLVED: To provide an electropneumatic conversion module capable of suppressing the pressure fluctuation of gas accompanied by the fluctuation of an ambient temperature. SOLUTION: The electropneumatic conversion module wherein a movable part displaced according to an input electric signal and disposed on a pedestal is arranged to confront a gas injection part for injecting gas generated in a flow passage forming part, and the gas supplied to the gas injection part according to the displacement of the movable part can be obtained in a gas output part is characterized in that the length of the thermal expansion of the gas injection part and the length of the thermal expansion of the pedestal are different from each other. COPYRIGHT: (C)2009,JPO&INPIT
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