| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for regenerating silicon with which much silicon can easily be recovered from a used slurry. SOLUTION: The apparatus for regenerating silicon includes: a solid-liquid separation section in which a used slurry discharged from a cutting or grinding device for cutting or grinding silicon using a slurry containing abrasive grains and a coolant or a used slurry concentrate prepared by concentrating the used slurry is subjected to solid-liquid separation to obtain a solid component for recovering silicon; a melting section in which the solid component for recovering silicon from a first washing section is melted and solidified to obtain a silicon-containing mass; a crushing section in which the silicon-containing mass is crushed to obtain a silicon-containing crushed product; and a second washing section in which the silicon-containing crushed product is washed with an aqueous acid solution and then washed with water. COPYRIGHT: (C)2009,JPO&INPIT
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