| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid transferring apparatus which is less influenced by a deformation characteristic due to an error at the time of manufacture and prevents manufacturing costs from inflating needlessly. SOLUTION: A piezoelectric actuator 3 includes both a diaphragm 30 secured to a predetermined surface of a channel unit 2 to block pressure chambers 14 formed in the channel unit 2, and a piezoelectric layer 31 stacked on the diaphragm 30. The diaphragm 30 is equipped with recesses 36 on the opposite side to the channel unit 2. The recess 36 is formed with a width which occupies from a position corresponding to the inside of the pressure chamber 14 to a position corresponding to the outside of the pressure chamber 14 in a region not overlapped with a first electrode 32 in a plane view. COPYRIGHT: (C)2009,JPO&INPIT
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