HEAD INSTALLATION APPARATUS, HEAD INSTALLATION METHOD, SUBSTRATE WORKING APPARATUS AND HEAD POSITIONING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a head installation apparatus which can reduce a burden of an apparatus cost and an operation concerning a highly accurate positioning of a head. SOLUTION: The head installation apparatus 1 moves a head fixation tool 13 along a slide rail 5 while reading a scale 19 of the head fixation tool 13 by a scale reading part 9 to carry out positioning of a standard point 61 in the side of the head fixation tool 13 and a standard point 63 in the side of the head installation apparatus 1. The head installation apparatus 1 measures the position of a nozzle opening 22 of a head 21 by a camera 11 to carry out positioning of the head 21 and fixes the head 21 to the head fixation tool 13 by an adhesive, etc. A substrate working apparatus 31 moves the head fixation tool 13 along the slide rail 5 while reading the scale 19 of the head fixation tool 13 by a scale reading part 57 to carry out positioning of the standard point 61 in the side of the head fixation tool 13 and a standard point 65 in the side of the substrate working apparatus 31 and fixes the head fixation tool 13 to a supporting member 51. COPYRIGHT: (C)2009,JPO&INPIT