发明名称 WIRE SAW PROCESS
摘要 This invention provides a method for increasing the cutting performance of a wire saw, in cutting a substrate, by increasing the association of the abrasive particles in the cutting slurry and the cutting wire, the enhancement being caused by the use of thickening agents in the cutting slurry or by increasing the attraction of the abrasive particles to the cutting wire.
申请公布号 WO2009017672(A3) 申请公布日期 2009.04.23
申请号 WO2008US09051 申请日期 2008.07.25
申请人 CABOT MICROELECTRONICS CORPORATION 发明人 NAM, CHUL WOO;MOEGGENBORG, KEVIN
分类号 H01L21/78 主分类号 H01L21/78
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