PROJECTION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a projection optical system with which adverse effects to optical performance due to its birefringency even when a glass material with birefringence caused by its crystal structure is used for a bottom lens group with excellent uniform birefringence between image heights and resolution.

SOLUTION: This projection optical system contains a plurality of lens groups and projects the image of a first object onto a second object. The bottom lens group arranged closest to the second object of the plurality of lens groups is formed of an isotropic crystal glass material with the refraction index of 1.6 or more and has a positive focal length. The radius of curvature R (mm) and the center thickness d (mm) of the surface of the first object of the bottom lens group satisfy 3.0>R/d>1.2 and d<60.

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