| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sucking apparatus which can goodly remove abrasion slag generated, in the case of patterning a substrate for solar cell. <P>SOLUTION: Sucking apparatus is provided with; an upper part movable chamber 11, of which upper surface is made of a porous surface plate 11A for sucking gas; a linear driving part 20, with which the upper part movable chamber 11 is shifted to one direction in a plane parallel to the porous surface plates 11A for sucking gas; side chambers 7, 7 which are parallel arrange along the shifting direction of the upper part movable chamber 11 with the linear driving part 20; and sucking gas source 35 connected with both side chambers 7, 7. The side chamber 7 is disposed in the inside of an endless running belt 6 wound between one pair of rollers 5, 5, respectively, and in these side chambers 7, 7, an opening hole part 7A covered with the running belt 6 along the longitudinal direction is formed, respectively. In the running belt 6, a vent tube 8 connected with the upper part movable chamber 11 at the position corresponding to the opening hole part 7A is fixedly arranged, and the inner parts in the upper part movable chamber 11 and the side chambers 7, 7, are communicated through this vent tube 8. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
