| 摘要 |
PROBLEM TO BE SOLVED: To solve problems wherein an ion beam source capable of creating an ion species with greater molecular weight is required since ion species are presently limited to roughly three species (C<SB>60</SB><SP>+</SP>, Au<SB>3</SB><SP>+</SP>, and Bi<SB>3</SB><SP>+</SP>) in the existing SIMS ion beam generation technique and a cluster ion beam source of a negative ion is required since conventional cluster ion beam generators are almost one type for creating a positive ion beam only with plus charge. SOLUTION: In an ion beam generator, a solution including an ion liquid is emitted into a gas phase by an electro-spray method, and necessary ions only are conveyed into an ion source. COPYRIGHT: (C)2009,JPO&INPIT
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