| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method for foreign matter and a device capable of detecting fine foreign matter on the surface, even if a sheet-shaped inspection object has a large width size or comprises a non-translucent material, and of preventing dispersion of a detection sensitivity or a detection minimum size in the width direction of the inspection object. SOLUTION: The sheet-shaped inspection object 1 is wound around a receiving roller 2 in the middle of a conveyance route and conveyed, and a laser light 3, having a linear front view is irradiated along the surface 1b of an inspection part on a line connecting both the ends in the width direction on a desired position in the conveyance direction of a winding conveyance part 1a, from a direction crossing to the width direction of the winding conveyance part 1a. The linear laser light 3 is received on a facing position across the surface 1b of the inspection part and a portion directly above it; and the light quantity is measured, and it is determined whether there is a foreign matter 4 on the surface of the inspection object 1, based on the measurement result. Foreign matter on the surface of even a non-translucent inspection object can also be detected, without being influenced by beam waist of the laser light. COPYRIGHT: (C)2009,JPO&INPIT
|
