SUBSTRATE DRYING DEVICE, DEVICE FOR MANUFACTURING FLAT PANEL DISPLAY, AND FLAT PANEL DISPLAY

摘要

PROBLEM TO BE SOLVED: To avoid an influence on a chamber of a substrate drying device by shortening a drying time for a substrate. SOLUTION: The substrate drying device has: a conveyance means 10 for conveying the substrate W horizontally or obliquely at a predetermined angle; an air knife nozzle 23 for removing liquid on the substrate by blowing air A to the substrate W conveyed by the conveying means 10 while having the liquid formed on its surface; and a steam supply means 22 disposed upstream from the air knife nozzle 23 of the conveying means 10 to supply steam S heated at predetermined temperature to the substrate W. The substrate W is heated using the steam S and then heated in a short time to improve processing efficiency. At the same time, the temperature abruptly falls after the steam S imparts heat energy to the substrate W, so an influence on the chamber can be avoided. COPYRIGHT: (C)2009,JPO&INPIT