摘要 |
<p>Intended is to prevent the contamination of an organic EL device. After a coloring layer (85a) of a first color was formed, an aligning device (60) moves a substrate (81) and a mask (16) relative to each other in a common vacuum bath (11), thereby to move the opening (17) of the mask (16) to a position over a region, in which a coloring layer (85b) of a next color is to be formed. Even if the mask (16) is not replaced, therefore, coloring layers (85a to 85c) of two or more colors can be formed, and the moving distance of the substrate (81) being formed can be shortened, so that no dust is made to prevent the contamination of the organic EL device.</p> |