| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power source, a sputtering power source, and a sputtering device capable of quickly and surely stopping arc discharge and preventing application of excessive power at the time of reapplying power and quickly coping with a grounding accident. <P>SOLUTION: In the power source in which DC power in the forward direction smoothed by an inductor is output to a load, a target value of current is calculated on the basis of the value wherein a target value of output power is divided by a measured value of the output voltage, and the current passing through the inductor is controlled on the basis of the measured value of current passing through the inductor and the target value of the current. <P>COPYRIGHT: (C)2009,JPO&INPIT |
