| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure discharge surface treatment device realizing surface treatment at low cost using humid discharge under atmospheric pressure without damaging the surface of an object for treatment. <P>SOLUTION: The atmospheric pressure discharge surface treatment device 1, carrying out surface treatment on an object for treatment such as a glass member with the use of an active species such as an OH radical, is provided with a blower 7 blowing humidified gas 12 with moisture on the surface of the object for treatment 10, and a high-voltage electrode 2 generating discharge plasma 11. <P>COPYRIGHT: (C)2009,JPO&INPIT |
