| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate support device assembling method and a substrate support device assembling assisting device that can arrange a support member on a support base in an easy and accurate manner or with high reliability. <P>SOLUTION: A half-mirror 60 is provided, while being tilted at a 45° with respect to a support plate 154, where a substrate support surface 44 of a backup pin 16 erected on the support base 12 is disposed, and a supported surface 152 of a printed-circuit board 86 perpendicular to the support base 12, and a blocking filter 64 is provided parallel to the support surface 14. The reflected light, in a normal direction from a supported point of the supported surface 152 to the supported surface 152, is reflected by the half-mirror 60 and impinges on the blocking filter 64 at right angles, and the reflected light in a normal direction from the substrate support surface 44 to the support plate 154 is transmitted through the half-mirror 60 and impinges on the blocking filter 46 at right angles. An operator peeps into the blocking filter 64 and disposes the backup pin 16, where images of the supported point and substrate support surface 44 overlap each other. The printed-circuit board and support base may be arranged in parallel. <P>COPYRIGHT: (C)2009,JPO&INPIT |
