| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a crystallizing method and a crystallizing system, which provides crystals with a large grain diameter by sufficiently taking a long growing time of the crystal. <P>SOLUTION: The crystallizing method comprises steps of: splitting a pulsed laser light oscillated from a laser oscillator and synthesizing the pulsed laser light advanced along optical paths of different optical path lengths; modulating the synthesized pulsed laser light into a pulsed laser light having a predetermined light intensity distribution by a phase modulation element; and irradiating the laser light having a predetermined light intensity distribution onto a non-single crystal film and crystallizing the non-single crystal film. In the step of splitting and synthesizing the pulsed laser light, in at least three optically splitting and synthesizing means sequentially arranged, a pulsed laser light split by one optically splitting and synthesizing means, is sequentially split by a following optically splitting and synthesizing means, and the other pulsed laser light split by one optically splitting and synthesizing means and the pulsed laser light split by a former optically splitting and synthesizing means are synthesized. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
