TWO-DIMENSIONAL PHOTONIC CRYSTAL LIGHT EMITTING ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a two-dimensional photonic crystal light emitting element capable of improving a manufacturing yield; and its manufacturing method. SOLUTION: This manufacturing method of this two-dimensional photonic crystal laser according to this invention executes the following processes. That is to say, the manufacturing method executes a process S20 of forming a GaN-based semiconductor layer on a substrate; a process S30 of forming an aluminum film on the GaN-based semiconductor layer; a process S40 of forming a resist film having a pattern on the aluminum film; a process S50 of forming a plurality of recessed parts constituting a two-dimensional diffraction grating on the GaN semiconductor layer by removing partial parts of the aluminum film and the GaN-based semiconductor layer by etching by using the resist film as a mask; a process S60 of removing the resist film and the aluminum film; and a process S70 of forming a GaN-based semiconductor layer 22 on the GaN-based semiconductor layer. COPYRIGHT: (C)2009,JPO&INPIT