PLASMA REACTOR, AND METHOD FOR THE PRODUCTION OF MONOCRYSTALLINE DIAMOND LAYERS
摘要
The invention relates to a plasma reactor which makes it possible to produce monocrystalline diamond layers on large areas of wafers. The invention further relates to a method for producing such diamond layers.
申请公布号
WO2008155087(A3)
申请公布日期
2009.03.19
申请号
WO2008EP04840
申请日期
2008.06.16
申请人
UNIVERSITAET AUGSBURG;SCHRECK, MATTHIAS;GSELL, STEFAN;FISCHER, MARTIN
