METHOD AND DEVICE FOR MEASURING FLUORINE GAS

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring a fluorine gas capable of quickly and correctly corresponding to changes in concentration of a fluorine gas and pre-treating a measuring portion without using a standard fluorine gas, and to provide a device therefor. SOLUTION: The method for measuring a concentration of a fluorine gas in a sample gas by using a luminescent fluorine gas concentration meter includes the step of measuring concentration of a fluorine gas in the sample gas after forming a fluoride layer by using xenon fluoride to a portion in contact with the sample gas of the luminescent fluorine gas concentration meter or after calibrating the luminescent fluorine gas concentration meter by using xenon fluoride. COPYRIGHT: (C)2009,JPO&INPIT