| 摘要 |
Disclosed herein are a sheet-like probe for wafer inspection, by which a good electrically connected state to a wafer can be surely achieved even when the pitch of electrodes to be inspected in the wafer is extremely small, and applications thereof. The sheet-like probe for wafer inspection of the invention has an insulating sheet, in which a plurality of through-holes each extending in a thickness-wise direction of the insulating sheet have been formed in accordance with a pattern corresponding to a pattern of electrodes to be inspected in all or part of integrated circuits formed on a wafer, and electrode structures arranged in the respective through-holes in the insulating sheet so as to protrude from both surfaces of the insulating sheet. Each of the electrode structures is formed by linking a front-surface electrode part exposed to a front surface of the insulating sheet and having a diameter greater than a front surface-side opening diameter of the through-hole in the insulating sheet to a back-surface electrode part exposed to a back surface of the insulating sheet and having a diameter greater than a back surface-side opening diameter of the through-hole in the insulating sheet through a short circuit part inserted through into the through-hole in the insulating sheet, and is movable in the thickness-wise direction of the insulating sheet.
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