Etching Silicon Oxide Material.,申请号GB19680011300-传众专利搜索

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发明名称	Etching Silicon Oxide Material.
摘要
申请公布号	GB1195944(A)	申请公布日期	1970.06.24
申请号	GB19680011300	申请日期	1968.03.08
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	DAVID EDWARD HOBBS;ARTHUR SCOTT JONES
分类号	H01L21/311	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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