CASSETTE STAGE EQUIPPED WITH TEACHING MECHANISM, SUBSTRATE TRANSFER APPARATUS HAVING THE SAME, AND SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus which can give accurate instructions for a substrate transfer robot in a cassette stage of opening/closing a cover of a cassette where the substrate is stored. SOLUTION: The cassette stage comprises: a first sensor 7 where an optical axis is set in parallel to a plane of substrate on a front side of a cassette 20; and a second and third sensors 9 where an optical axis is set in an equally separating distance from a central axis of front side of the cassette 20. COPYRIGHT: (C)2009,JPO&INPIT